Method of manufacturing a capacitor in a semiconductor device

ABSTRACT

The present invention relates to a method of manufacturing a capacitor in a semiconductor device. It is designed to solve the problem due to oxidization of the surface of the underlying tungsten electrode during thermal process performed after depositing Ta 2 O 5  to form a dielectric film in a Ta 2 O 5  capacitor of a MIM (Metal Insulator Metal) structure using tungsten (W) as an underlying electrode. Thus, the present invention includes forming a good thin WO 3  film by processing the surface of the underlying tungsten electrode by low oxidization process before forming a Ta 2 O 5  dielectric film and then performing deposition and thermal process of Ta 2 O 5  to form a Ta 2 O 5  dielectric film. As a good WO 3  film is formed on the surface of the underlying tungsten electrode before forming a Ta 2 O 5  dielectric film, the grain boundary of the tungsten film is filled with oxygen atoms, thus preventing diffusion of oxygen atoms from the Ta 2 O 5  dielectric film during a subsequent thermal process. Also, as a further oxidization of the surface of the underlying tungsten electrode by the WO 3  film could be prevented, thereby improving the characteristic of the leak current of the Ta 2 O 5  capacitor.

RELATED APPLICATIONS

[0001] This is a Divisional of U.S. patent application Ser. No. 09/659,508, filed Sep. 11, 2000, now U.S. Pat. No. ______.

BACKGROUND OF THE INVENTION

[0002] 1. Field of the Invention

[0003] The invention relates generally to a method of manufacturing a capacitor in a semiconductor device, and more particularly to, a method of manufacturing a capacitor in a semiconductor device which can prevent oxidization of the surface of an underlying electrode to improve the characteristic of the leak current of a Ta₂O₅ capacitor, upon a thermal treatment process performed after Ta₂O₅ is deposited in order to form a dielectric film, in a Ta₂O₅ capacitor of a MIM (Metal Insulator Metal) structure using tungsten (W) as an underlying electrode.

[0004] 2. Description of the Prior Art

[0005] Generally, when manufacturing a Ta₂O₅capacitor in a memory device, if metal materials such as Tungsten are used as underlying electrode materials, the work function of the metal materials with poly-silicon is large. Thus, the thickness of the effective oxide film Tox can be reduced and thus the leak current in the thickness of the same effective oxide film can also be reduced. Further, the value of ΔC depending on the bias voltage is small. As a Ta₂O₅ dielectric film lacks oxygen in the film formed by Ta₂O₅ deposition process and also contains impurities such as carbon or hydrogen etc., in order to secure the dielectric characteristic of the Ta₂O₅ capacitor, oxygen must be flowed into it and a subsequent process for removing impurities must be performed after the Ta₂O₅ deposition is completed.

[0006] This subsequent process is mainly thermally performed under oxygen atmosphere at a higher temperature, thus securing the dielectric characteristic of a Ta₂O₅ dielectric film. However, if the temperature of the thermal process is too high or the time of the thermal treatment is too long, upon thermal treatment process, the surface of the underlying tungsten electrode is oxidized to form a WO₃ film. The WO₃ film has the dielectric constant of about 42, which is higher than that of Ta₂O₅ dielectric film having about 25. However, when creating the WO₃ film, there is a possibility that oxygen within the Ta₂O₅ dielectric film can be diffused into the underlying tungsten electrode. Also, due to the difference of the thermal expansion coefficient with the Ta₂O₅ dielectric film, there is a problem that the characteristic of the leak current of the Ta₂O₅ capacitor becomes degraded since a phenomenon of film lifting of the film is generated.

SUMMARY OF THE INVENTION

[0007] It is therefore an object of the present invention to provide a method of manufacturing a capacitor in a semiconductor device which can prevent oxidization of the surface of an underlying electrode to improve the characteristic of the leak current of a Ta₂O₅ capacitor, upon a thermal treatment process performed after Ta₂O₅ is deposited in order to form a dielectric film, in a Ta₂O₅ capacitor of a MIM (Metal Insulator Metal) structure using tungsten (W) as an underlying electrode.

[0008] In order to accomplish the object, a method of manufacturing a capacitor in a semiconductor device according to the present invention is characterized in that it comprises the steps of forming an underlying tungsten electrode on a substrate in which an underlying structure is formed; forming a WO₃ film on the surface of the underlying tungsten electrode; forming a Ta₂O₅ dielectric film on the WO₃ film; and forming an upper electrode on the Ta₂O₅ dielectric film.

BRIEF DESCRIPTION OF THE DRAWINGS

[0009] The aforementioned aspects and other features of the present invention will be explained in the following description, taken in conjunction with the accompanying drawings, wherein:

[0010]FIGS. 1A through 1D are sectional views for illustrating a method of manufacturing a capacitor in a semiconductor device according to the present invention; and

[0011]FIG. 2 is a graph of I-V characteristic for showing the leak current characteristic of a capacitor depending on a thermal process under a low temperature oxygen atmosphere before a Ta₂O₅ dielectric film is formed.

DETAILED DESCRIPTION OF PREFERRED EMBODIMENTS

[0012] The present invention will be described in detail by way of a preferred embodiment with reference to accompanying drawings, in which like reference numerals are used to identify the same or similar parts.

[0013]FIGS. 1A through 1D are sectional views for illustrating a method of manufacturing a capacitor in a semiconductor device according to the present invention.

[0014] Referring now to FIG. 1A, a first doped poly-silicon layer 1 is formed on a substrate 10 in which an underlying structure is formed. Then, a barrier metal layer 2 is formed on the first doped poly-silicon layer 1.

[0015] In the above, the barrier metal layer 2 is formed of a Ti film and a TiN film. The Ti film is formed by depositing Ti in 100 through 200 Å thickness by means of sputtering method. The TiN film is formed in 100 through 200 Å thickness by means of metal organic chemical vapor deposition (MOCVD) method using Ti(N(CH₃)₂)₄(TDMAT) as raw materials and using He and Ar as carrier gases. At this time, the deposition conditions include 200-300 sccm in the flow rate of raw materials; 100 through 300 sccm in the flow rate of He and Ar, respectively, being carrier gases; 2-10 Torr in the pressure within the reactive furnace and 300-500° C. in the temperature within the reactive furnace. Thereafter, a plasma process is performed for about 20 through 50 seconds with the power of 500 through 1000 W.

[0016] Referring now to FIG. 1B, a tungsten film 3 is formed on the barrier metal layer 2 to complete an underlying electrode.

[0017] In the above, the tungsten film 3 is formed by chemical vapor deposition (CVD) method under the conditions that WF₆is used as raw materials, H₂ is used as a reactive gas, the pressure within the reactive furnace is maintained at 80-110 Torr, and the temperature within the reactive furnace is maintained at the temperature of 350-450° C.

[0018] Referring to FIG. 1C, after removing a native oxide film in which impurities created on the surface of the tungsten film 3 are contained by means of cleaning process, a WO₃ film 100 is forcedly formed on the surface of the tungsten film 3. Then, a Ta₂O₅ dielectric film 4 is formed on the WO₃ film 100.

[0019] In the above, the cleaning process is performed using 50:1 HF for 30 through 50 seconds. The WO₃ film 100 is formed in thickness of 10-30 Å by oxidizing the tungsten film 3 by means of Rapid Thermal Anneal (RTA), plasma process or UV/O₃ process etc. under a low temperature oxygen atmosphere. The WO₃ film 100 formed thus is good in the quality of the film and also fills the grain boundary of the tungsten film 3 with oxygen atoms. The rapid thermal process is performed under the atmospheres of O₂ or N₂O at the temperature of 450-550° C. for 5-20 seconds. The plasma process is performed under the atmospheres of O₂ or N₂O at the temperature of 300-550° C. for 30-120 seconds by the power of 200-500 W. The UV/O₃ process is performed at the temperature of 300-550° C. for 2-5 minutes at the strength of 15-30 mW/cm².

[0020] The Ta₂O₅ dielectric film 4 is deposited with use Ta₂O₅ under the conditions that Ta(C₂H₅O)₅ is used as raw materials, N₂ gas and O₂ gas is used as a carrier gas and an oxidizer, respectively, the flow rate of the N₂gas is maintained at 350-450 sccm, the flow rate of the O₂ gas is maintained at 20-50 sccm, the pressure within the reactive furnace is maintained at 0.1-0.6 Torr, and the temperature within the reactive furnace is maintained at 350-450° C. Then, in order to prevent oxidization of the tungsten film 3 being an underlying electrode while obtaining a dielectric characteristic, the Ta₂O₅ dielectric film 4 is experienced by a rapid thermal process by mixing inactive gases such as N₂, Ar, He etc. in N₂O gas or O₂ gas at the temperature of 550-700° C. for 20-60 seconds, or by a plasma annealing process under oxygen atmosphere using O₂ gas or N₂O gas by which a plasma power of 10-100 W is applied at the temperature of less 350° C.

[0021] Referring to FIG. 1D, a TiN film 5 and a second doped poly-silicon layer 6 are sequentially formed on the Ta₂O₅ dielectric film 4, thus completing an upper electrode of a capacitor. By means of a series of these processes, a Ta₂O₅ capacitor of a MIM structure is manufactured.

[0022] In the above, the TiN film 5 is formed in thickness of 200-500 Å by means of chemical vapor deposition (CVD) method under the conditions that TiCl₄ is used as raw materials, NH₃ gas is used as a reactive gas, the temperature within the reactive furnace is maintained at 300-500° C. and the pressure within the reactive furnace is maintained at 0.1-2 Torr. The second poly-silicon layer 6 is formed in thickness of 800-1200 Å. The TiN film 5 functions to reduce the work function with the second poly-silicon layer 6 and the Ta₂O₅ dielectric film 4.

[0023]FIG. 2 is a graph of I-V characteristic for illustrating the leak current characteristic of a capacitor when comparing the method according to the present invention by which O₂-RTA is performed at the temperature of 500° C. under the atmosphere of oxygen with the conventional method in which no process is performed before a Ta₂O₅ dielectric film is formed.

[0024] In order to compare the leak current characteristic, the Ta₂O₅ dielectric films in the present invention and the conventional method are formed identically. As shown in FIG. 2, the thickness of the effective oxide film Tox is almost same in both cases of the conventional method and the present invention. However, it could be seen that the leak current in the present invention has been greatly improved. In other words, the leak current at LV in the conventional method shows 4.32E−5 (A/cm²) while that in the present invention shows 2.58E−8 (A/cm²). Also, it could be seen that the leak current in the present invention is greatly improved even in the negative voltage.

[0025] As can be understood from the above description with the present invention, the present invention forms a good WO₃ film on the surface of the underlying tungsten electrode before forming a Ta₂O₅ dielectric film in a Ta₂O₅ capacitor using tungsten as an underlying electrode. As the grain boundary of the tungsten film is filled with oxygen atoms, diffusion of oxygen atoms from the Ta₂O₅ dielectric film can be prevented during a subsequent thermal process. Thus, the intrinsic characteristic of the Ta₂O₅ dielectric film can be intact. Also, a further oxidization of the surface of the underlying tungsten electrode by the WO₃ film could be prevented, thereby improving the characteristic of the leak current of the Ta₂O₅ capacitor.

[0026] The present invention has been described with reference to a particular embodiment in connection with a particular application. Those having ordinary skill in the art and access to the teachings of the present invention will recognize additional modifications and applications within the scope thereof.

[0027] It is therefore intended by the appended claims to cover any and all such applications, modifications, and embodiments within the scope of the present invention. 

What is claimed is:
 1. A semiconductor device having a capacitor comprising: a substrate containing an underlying structure; a tungsten electrode formed on the substrate; a WO₃ film formed on the surface of the tungsten; a dielectric film formed on the WO₃ film; and a upper electrode formed on the dielectric film, wherein, the WO₃ film prevents the diffusion of oxygen atoms from the dielectric film into the tungsten film.
 2. A capacitor comprising: a tungsten electrode supported by a substrate; a WO₃ film formed on the surface of the tungsten; a dielectric film formed on the WO₃ film; and a upper electrode formed on the dielectric film, wherein, the WO₃ film prevents the diffusion of oxygen atoms from the dielectric film into the tungsten film. 